[1] Albert Ludwig Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Proc Engn, NeptunLab, D-79110 Freiburg, Germany
[2] Albert Ludwig Univ Freiburg, Freiburg Mat Res Ctr FMF, D-79104 Freiburg, Germany
[3] Karlsruhe Inst Technol KIT, Inst Appl Mat IAM, D-76131 Karlsruhe, Germany
[4] IAM KWT Ceram Mat & Technol, Haid & Neu Str 7, D-76131 Karlsruhe, Germany
[5] Albert Ludwig Univ Freiburg, Inst Phys Chem, D-79104 Freiburg, Germany
[6] Albert Ludwig Univ Freiburg, Inst Macromol Chem, D-79104 Freiburg, Germany
[7] Albert Ludwig Univ Freiburg, Dept Microsyst Engn IMTEK, Gisela & Erwin Sick Chair Microopt, D-79110 Freiburg, Germany
[8] Hahn Schickard, Georges Kohler Allee 103, D-79110 Freiburg, Germany
[9] Albert Ludwig Univ Freiburg, Dept Microsyst Engn IMTEK, Electrochem Energy Syst, D-79110 Freiburg, Germany
[10] IAM ZM MicroTribol Ctr TC, Kaiserstr 5, D-76131 Karlsruhe, Germany
[11] Glassomer GmbH, Georges Kohler Allee 103, D-79110 Freiburg, Germany
[12] Albert Ludwig Univ Freiburg, FIT Freiburg Ctr Interact Mat & Bioinspired Techn, D-79110 Freiburg, Germany