Two-dimensional sub-5 nm hard x-ray focusing with MZP

被引：5

作者：

Osterhoff, Markus ^{[1
]}

Bartels, Matthias ^{[1
]}

Doering, Florian ^{[2
]}

Eberl, Christian ^{[2
]}

Hoinkes, Thomas ^{[3
]}

Hoffmann, Sarah ^{[1
]}

Liese, Tobias ^{[2
]}

Radisch, Volker ^{[2
]}

Rauschenbeutel, Arno

Robisch, Anna-Lena ^{[1
]}

Ruhlandt, Aike ^{[1
]}

Schlenkrich, Felix ^{[2
]}

Salditt, Tim ^{[1
]}

Krebs, Hans-Ulrich ^{[2
]}

机构：

[1] Univ Gottingen, Inst Rontgenphys, Friedrich Hund Pl 1, D-37077 Gottingen, Germany

[2] Univ Gottingen, Inst Matphys, D-37077 Gottingen, Germany

[3] Vienna Ctr Quantum Sci & Technol, A-1020 Vienna, Austria

来源：

ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS VIII | 2013年 / 8848卷

关键词：

multilayer zone plate; hard x-ray focusing; pulsed laser deposition; sub-5 nm focus; combined optics; ZONE PLATES; MICROSCOPY;

D O I：

10.1117/12.2025389

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm x 200 nm; in their defocus, two MZP lenses of diameter of 1.6 mu m and 3.7 mu m have been placed, with focal lengths of 50 mu m and 250 mu m respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm x 4.7 nm (7.9 keV, W/Si)(1) and 4.3 nm x 5.9 nm (13.8 keV, W/ZrO2), respectively.

引用

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