Controlling the infrared optical properties of rf-sputtered NiO films for applications of infrared window

被引：9

作者：

Shim, Hyun Bin ^{[1
]}

Kang, In-Ku ^{[1
]}

Jeon, Gwang-Jae ^{[1
]}

Kim, Woo Young ^{[2
]}

Lee, Hee Chul ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305701, South Korea

[2] Korea Adv Inst Sci & Technol, Dept Mech Engn, Taejon 305701, South Korea

来源：

INFRARED PHYSICS & TECHNOLOGY | 2015年 / 72卷

基金：

新加坡国家研究基金会;

关键词：

Nickel oxide; Infrared window; Anti-reflection coating; Annealing; THIN-FILMS; MECHANICAL-PROPERTIES; CARBON-FILMS; SILICON; ABSORPTION; CONSTANTS; COATINGS;

D O I：

10.1016/j.infrared.2015.07.023

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this paper, we will focus on an IR transmittance enhancement technique from the window material point of view by using metal oxides, especially nickel oxide (NiO). At first, anti-reflection (AR) coatings were modeled by using the optical properties of NiO films. The transmittance of the model was predicted using Swanepoel's model and verified with NiO film prepared by rf magnetron sputtering. Also, post-deposition annealing was performed and was found to change the optical properties of the NiO film. Therefore, we analyzed the annealing effect on the IR optical properties of the NiO film. Furthermore, we confirmed the durability of the NiO film and verified the possibility of this material being used in infrared optics. (c) 2015 Elsevier B.V. All rights reserved.

引用

页码：135 / 139

页数：5

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