Synthesis and characterization of organo-soluble and photosensitive benzocyclobutene-terminated imides

被引:14
作者
Yang, Jun [1 ]
Cheng, Yuanrong [1 ]
Jin, Yunxia [1 ]
Deng, Dunying [1 ]
Xiao, Fei [1 ]
机构
[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
关键词
Benzocyclobutene; Thermosets; Curing kinetics; Mechanical properties; Thermal properties; Photosensitivity; ORGANOSOLUBLE POLYIMIDES; POLYMER SYNTHESIS; AROMATIC IMIDES; PHENYL METHANE; BISBENZOCYCLOBUTENE; DIANHYDRIDE; THERMOSETS;
D O I
10.1016/j.eurpolymj.2013.02.017
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220-270 degrees C. The curing kinetic parameters, the apparent activation energy (E-a), the frequency factor (A) and the reaction order (n), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability (T-d5 > 435 degrees C), high glass transition temperature (T-g > 300 degrees C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1642 / 1653
页数:12
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