Synthesis and characterization of organo-soluble and photosensitive benzocyclobutene-terminated imides

被引：15
作者：
Yang, Jun [1 ]
Cheng, Yuanrong [1 ]
Jin, Yunxia [1 ]
Deng, Dunying [1 ]
Xiao, Fei [1 ]
机构：
[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
来源：
EUROPEAN POLYMER JOURNAL | 2013年 / 49卷 / 06期
关键词：
Benzocyclobutene; Thermosets; Curing kinetics; Mechanical properties; Thermal properties; Photosensitivity; ORGANOSOLUBLE POLYIMIDES; POLYMER SYNTHESIS; AROMATIC IMIDES; PHENYL METHANE; BISBENZOCYCLOBUTENE; DIANHYDRIDE; THERMOSETS;
D O I：
10.1016/j.eurpolymj.2013.02.017
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
Three kinds of benzocyclobutene (BCB)-terminated imide monomers have been synthesized by the imidization and Heck reaction. The obtained BCB monomers exhibit good solubility in a wide range of organic solvents at room temperature. The BCB monomers show an exothermal curing behavior in the range of 220-270 degrees C. The curing kinetic parameters, the apparent activation energy (E-a), the frequency factor (A) and the reaction order (n), are obtained by non-isothermal DSC method. The cured BCB resins exhibit good thermal stability (T-d5 > 435 degrees C), high glass transition temperature (T-g > 300 degrees C) and low dielectric constant. Moreover, high quality negative patterns of the BCB films are obtained after the photolithography. (C) 2013 Elsevier Ltd. All rights reserved.
引用
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页码：1642 / 1653
页数：12
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