Near-field holography manufactures submicron gratings

被引：0
|
作者：
Cullmann, E [1 ]
机构：
[1] Suss MicroTec AG, Garching, Germany
来源：
PHOTONICS SPECTRA | 2004年 / 38卷 / 04期
关键词：
Coherent laser - Near-field holography - Standing-wave pattern - Submicron gratings;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
(Edited Abstract)
引用
收藏
页码：110 / 112
页数：3
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