Thermal noise of microcantilevers in viscous fluids

被引:17
作者
Bellon, L. [1 ]
机构
[1] Univ Lyon, CNRS, Phys Lab, Ecole Normale Super Lyon,UMR5672, F-69364 Lyon 07, France
关键词
atomic force microscopy; beams (structures); cantilevers; drag; fluctuations; micromechanical devices; thermal noise;
D O I
10.1063/1.3021102
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a simple theoretical framework to describe the thermal noise of a microscopic mechanical beam in a viscous fluid: we use the Sader approach to describe the effect of the surrounding fluid (added mass and viscous drag) and the fluctuation dissipation theorem for each flexural modes of the system to derive a general expression for the power spectrum density of fluctuations. This prediction is compared with an experimental measurement on a commercial atomic force microscopy cantilever in a frequency range covering the two first resonances. A very good agreement is found on the whole spectrum, with no adjustable parameters but the thickness of the cantilever.
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页数:4
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