Construction and use of LB deposition machines for pilot production

被引：12
作者：
Albrecht, O
Matsuda, H
Eguchi, K
Nakagiri, T
机构：
[1] Canon Research Center, Canon Inc., Atsugi, Kanagawa 243-01
来源：
THIN SOLID FILMS | 1996年 / 284卷
关键词：
Langmuir-Blodgett films; film fabrication; flow orientation; age control;
D O I：
10.1016/S0040-6090(95)08294-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We describe the construction of Langmuir-Blodgett (LB) deposition equipment that was designed for pilot production to prove (or disprove) whether it is feasible to bring the LB technology to a state that is compatible with the necessary reliability, throughput and quality for mass production. Encouraging first results indicate that this is feasible and suggest many useful ideas and procedures also for the laboratory environment.
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页码：152 / 156
页数：5
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