Different growth mechanisms of Ge by Stranski-Krastanow on Si (111) and (001) surfaces: An STM study

被引:15
作者
Teys, S. A. [1 ]
机构
[1] RAS, SB, Rzhanov Inst Semicond Phys, 13 Lavrentyeva Ave, Novosibirsk 630090, Russia
基金
俄罗斯基础研究基金会;
关键词
Stranski-Krastanow mechanism; Ge-Si; Surface reconstructions; Scanning tunneling microscopy; Molecular beam epitaxy; SCANNING-TUNNELING-MICROSCOPY; SI(111); GE/SI(111); EPITAXY; GERMANIUM; NUCLEATION; GE/SI(001); PATHWAY; NICKEL; LAYERS;
D O I
10.1016/j.apsusc.2016.09.124
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Structural and morphological features of the wetting layer formation and the transition to the threedimensional Ge growth on (111) and (100) Si surfaces under quasi-equilibrium growth conditions were studied by means of scanning tunneling microscopy. The mechanism of the transition from the wetting layer to the three-dimensional Ge growth on Si was demonstrated. The principal differences and general trends of the atomic processes involved in the wetting layers formation on substrates with different orientations were demonstrated. The Ge growth is accompanied by the Ge atom redistribution and partial strain relaxation due to the formation of new surfaces, vacancies and surface structures of a decreased density. The analysis of three-dimensional Ge islands sites nucleation of after the wetting layer formation was carried out on the (111) surface. The transition to the three-dimensional growth at the Si(100) surface begins with single {105} facets nucleation on the rough Ge(100) surface. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码:1017 / 1025
页数:9
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