Surface evolution in ultrafast laser ablation of fused silica

被引：5

作者：

Wang, Han ^{[1
]}

Zhao, Kai ^{[2
]}

Shen, Hong ^{[1
,3
]}

Yao, Zhenqiang ^{[1
,3
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Shanghai 200240, Peoples R China

[2] Shanghai Aerosp Equipments Manufacturer CoLtd, Shanghai 200245, Peoples R China

[3] State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China

来源：

OPTICS AND LASER TECHNOLOGY | 2020年 / 131卷

基金：

中国国家自然科学基金;

关键词：

Picosecond laser; Micro channel; Numerical model; Sectional profile; Fused silica; MICROCHANNEL; FABRICATION; DAMAGE; PULSES;

D O I：

10.1016/j.optlastec.2020.106420

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In present work, a pulse-by-pulse ablation model is established to numerically predict the surface evolution by ultrafast laser ablation of fused silica, where the changes of surface morphology and ablation threshold caused by preceding pulses are taken into consideration. The present model, in which the ablation coefficient is experimentally calibrated at different pulse energies, is used to predict the sectional profiles of micro channels at different scanning velocities, repetition frequencies and scanning strategies. The causes of the predictive errors and the scope of the model are analyzed to illustrate the effectiveness of the present model.

引用

页数：13

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