Fabrication-Tolerant Waveguide Chirped Grating Coupler for Coupling to a Perfectly Vertical Optical Fiber

被引：113

作者：

Chen, Xia ^{[1
]}

Li, Chao ^{[1
]}

Tsang, Hon Ki ^{[1
]}

机构：

[1] Chinese Univ Hong Kong, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2008年 / 20卷 / 21-24期

关键词：

Gratings; integrated optics; silicon-on-insulator (SOI) technology; waveguide couplers;

D O I：

10.1109/LPT.2008.2004715

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the simulation, fabrication, and measurement results of a waveguide grating coupler that could efficiently couple light between submicrometer-sized planar waveguides and vertical optical fibers. The coupler comprises a section of chirped grating which reduces back reflection and enhances coupling efficiency. Coupling efficiency of over 34% was measured and a 3-dB bandwidth of 45 nm was obtained. An experimental study showed that the coupling efficiency was tolerant to fabrication process fluctuations which may lead to random variations in slot width and the duty cycle of the grating periods.

引用

页码：1914 / 1916

页数：3

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