Frequency locking in the internal resonance of two electrostatically coupled micro-resonators with frequency ratio 1:3

被引：54
作者：
Wang, Xuefeng [1 ]
Huan, Ronghua [1 ]
Zhu, Weiqiu [1 ]
Pu, Dong [1 ]
Wei, Xueyong [2 ]
机构：
[1] Zhejiang Univ, Dept Mech, Key Lab Soft Machines & Smart Devices Zhejiang Pr, Hangzhou 310027, Peoples R China
[2] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Peoples R China
来源：
MECHANICAL SYSTEMS AND SIGNAL PROCESSING | 2021年 / 146卷
基金：
中国国家自然科学基金; 国家重点研发计划;
关键词：
Nonlinear dynamics; Internal resonance; Frequency locking; MEMS; Frequency stability;
D O I：
10.1016/j.ymssp.2020.106981
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
The internal resonance of electrostatically coupled cubic nonlinear low-frequency micro-resonator and linear high-frequency micro-resonator is investigated experimentally. A phenomenon of frequency locking is observed at 1:3 frequency ratio of two resonators for the first time when the coupling strength exceeds a certain value. Then the theoretical study is made to explain the frequency locking phenomenon. Finally, this phenomenon is used to enhance the short-time frequency stability of low-frequency resonator nearly 7-fold. (C) 2020 Elsevier Ltd. All rights reserved.
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页数：14
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