Design, fabrication, and preliminary test results of a new InGaAsP/InP high-Q ring resonator for gyro applications

被引：0

作者：

Dell'Olio, Francesco ^{[1
]}

Ciminelli, Caterina ^{[1
]}

Armenise, Mario N. ^{[1
]}

Soares, Francisco M. ^{[2
]}

Rehbein, Wolfgang ^{[2
]}

机构：

[1] Politecn Bari, Optoelect Lab, Via Orabona 4, I-70125 Bari, Italy

[2] Heinrich Hertz Inst Nachrichtentech Berlin GmbH, Fraunhofer Inst Telecommun, D-10587 Berlin, Germany

来源：

2012 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS (IPRM) | 2013年

关键词：

Gyroscopes; Integrated optoelectronics; Optoelectronic and photonic sensors; Optoelectronic devices;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Design, fabrication and initial characterization of large-size InGaAsP/InP ring resonators for gyro applications are reported in this paper. The devices configuration includes a ring with a radius of 13 mm and a straight bus waveguide with tapered ends. Four cavities with the same radius and different values of the bus/ring gap have been fabricated by metal-organic vapour-phase-epitaxy, standard photolithography and reactive ion etching. Characterization results show that the resonator with nominal gap = 1.444 ae m has a quality factor exceeding 7x10(5) and resonance depth close to 10 dB.

引用

页码：124 / 127

页数：4

共 18 条

[1]

Acar C, 2009, MEMS REF SHELF, P3

[2]

[Anonymous], 2010, FOUND MIOS PROJ N 40

[3]

Armenise M., 1998, Proceedings of the SPIE - The International Society for Optical Engineering, V3464, P81, DOI 10.1117/12.323129

[4]

Armenise MN, 2004, ESA SP PUBL, V554, P595

[5] Modeling and design of a novel miniaturized integrated optical sensor for gyroscope systems [J].

Armenise, MN ;

Passaro, VMN ;

De Leonardis, F ;

Armenise, M .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 2001, 19 (10) :1476-1494

[6] A high-Q wavelength filter based on buried heterostructure ring resonators integrated with a semiconductor optical amplifier [J].

Choi, SJ ;

Peng, Z ;

Yang, Q ;

Hwang, EH ;

Dapkus, PD .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (10) :2101-2103

[7] Laterally coupled buried heterostructure high-Q ring resonators [J].

Choi, SJ ;

Djordjev, K ;

Peng, Z ;

Yang, Q ;

Choi, SJ ;

Dapkus, PD .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (10) :2266-2268

[8] A new integrated optical angular velocity sensor [J].

Ciminelli, C ;

Peluso, F ;

Armenise, MN .

INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES IX, 2005, 5728 :93-100

[9]

Ciminelli C., 2010, 1 NETWORKING PARTNER

[10] Photonic technologies for angular velocity sensing [J].

Ciminelli, Caterina ;

Dell'Olio, Francesco ;

Campanella, Carlo E. ;

Armenise, Mario N. .

ADVANCES IN OPTICS AND PHOTONICS, 2010, 2 (03) :370-404

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