Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

被引：35

作者：

Chen, Z. ^{[1
]}

D'Alfonso, A. J. ^{[2
]}

Weyland, M. ^{[3
,4
]}

Taplin, D. J. ^{[1
]}

Allen, L. J. ^{[2
]}

Findlay, S. D. ^{[1
]}

机构：

[1] Monash Univ, Sch Phys & Astron, Clayton, Vic 3800, Australia

[2] Univ Melbourne, Sch Phys, Parkville, Vic 3010, Australia

[3] Monash Univ, Monash Ctr Electron Microscopy, Clayton, Vic 3800, Australia

[4] Monash Univ, Dept Mat Sci & Engn, Clayton, Vic 3800, Australia

来源：

ULTRAMICROSCOPY | 2015年 / 157卷

关键词：

Scanning transmission electron microscopy (STEM); Energy dispersive X-ray (EDX) spectroscopy; QUANTITATIVE-ANALYSIS; CONTRAST; DETECTOR; ALCHEMI; ATOMS; PROBE;

D O I：

10.1016/j.ultramic.2015.05.010

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：21 / 26

页数：6

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