A Novel AFM Imaging Method Based on Liquid Force-Distance Curve Analysis

被引：0

作者：

Yuan, Xiaozhe ^{[1
,2
]}

Fang, Yongchun ^{[1
,2
]}

Ren, Xiao ^{[1
,2
]}

机构：

[1] Nankai Univ, Inst Robot & Automat Informat Syst, Tianjin 300071, Peoples R China

[2] Tianjin Key Lab Intelligent Robot, Tianjin 300071, Peoples R China

来源：

PROCEEDINGS OF THE 2016 12TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION (WCICA) | 2016年

关键词：

MICROSCOPY;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

When atomic force microscopy (AFM) systems are employed for scanning tasks in liquid, unexpected nonlinearity caused by laser refraction leads to the distortion of AFM images. A novel liquid imaging method is proposed for high-speed AFM systems. Specifically, imaging signal compensation based on liquid force curve analysis is obtained to remedy the distortion from refraction nonlinearity; and then considering the dynamic characteristics of piezo scanner, which limits the performance of high-speed imaging, the dynamic model of piezo scanner in Z-axis is utilized to improve the AFM's imaging accuracy during high-speed scanning. Experimental results are provided to illustrate the efficacy of proposed liquid imaging method.

引用

页码：3161 / 3166

页数：6

共 14 条

[1]

Bar A.M., 2012, ATOMIC FORCE MICROSC

[2] ATOMIC FORCE MICROSCOPE [J].