Plasma Treatment of Glass Surfaces Using Diffuse Coplanar Surface Barrier Discharge in Ambient Air

被引:66
作者
Homola, Tomas [1 ,2 ]
Matousek, Jindrich [3 ]
Kormunda, Martin [3 ]
Wu, Linda Y. L. [2 ]
Cernak, Mirko [1 ,4 ]
机构
[1] Masaryk Univ, R&D Ctr Low Cost Plasma & Nanotechnol Surface Mod, CS-61137 Brno, Czech Republic
[2] Singapore Inst Mfg Technol, Surface Technol Grp, Singapore 638075, Singapore
[3] Univ JE Purkyne, Fac Sci, Dept Phys, Usti Nad Labem 40096, Czech Republic
[4] Comenius Univ, Dept Expt Phys, Fac Math Phys & Informat, Bratislava 84248, Slovakia
关键词
Atmospheric pressure air plasma; DCSBD; Diffuse plasma; Glass surface; XPS; ATMOSPHERIC-PRESSURE; SPARK DISCHARGE; AGING BEHAVIOR; ACTIVATION; FILMS; MECHANISM; HELIUM;
D O I
10.1007/s11090-013-9467-3
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
We report a study on the treatment of flat glass surfaces by ambient air atmospheric pressure plasma, generated by a dielectric barrier discharge of coplanar arrangement of the electrode system-the diffuse coplanar surface barrier discharge (DCSBD). The plasma treatment of glass was performed in both static and dynamic modes. With respect to wettability of the glass surface, treatment in static mode resulted in non-uniform surface properties, whereas dynamic mode provided a fully uniform treatment. A water contact angle measurement was used to determine the efficiency of plasma treatments in dynamic mode and also to investigate a hydrophobic recovery of plasma treated glass surfaces. The X-ray photoelectron spectroscopy measurements showed a decrease of overall carbon concentrations after plasma treatment. A deconvolution of C1s peak, showed that a short plasma treatment led to decrease of C-C bonds concentration and increases of C-O and O-C=O bond concentrations. An enhancing influence of the glass surface itself on DCSBD diffuse plasma was observed and explained by different discharge onsets and changes in the electric field distribution.
引用
收藏
页码:881 / 894
页数:14
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