Effects of carbon content on the microstructure and mechanical property of cathodic arc evaporation deposited CrCN thin films

被引：44

作者：

Tong, Cheng-Yi ^{[1
]}

Lee, Jyh-Wei ^{[2
,3
]}

Kuo, Chil-Chyuan ^{[1
]}

Huang, Sung-Hsiu ^{[4
]}

Chan, Yu-Chen ^{[5
]}

Chen, Hsien-Wei ^{[5
]}

Duh, Jenq-Gong ^{[5
]}

机构：

[1] Ming Chi Univ Technol, Dept Mech Engn, Taipei, Taiwan

[2] Ming Chi Univ Technol, Dept Mat Engn, Taipei, Taiwan

[3] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, Taipei, Taiwan

[4] Gigastorage Corp, Hsinchu, Taiwan

[5] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

来源：

SURFACE & COATINGS TECHNOLOGY | 2013年 / 231卷

关键词：

Cathodic arc evaporation deposition; CrCN; Tribological properties; Pin-on-disk wear; HRC-DB; COATINGS;

D O I：

10.1016/j.surfcoat.2012.01.009

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Chromium nitride coating is characterized for its adequate mechanical properties, corrosion and oxidation resistance. The addition of carbon into the chromium nitride coating can improve the hardness and tribological properties effectively. In this study, a series of higher nitrogen contained CrCN thin films with different carbon contents were grown by the cathodic arc evaporation (CAE) deposition method using different flow ratios of N-2 and C2H2 gas mixture. The crystalline structure, surface roughness, microstructures, hardness, adhesion and tribological properties were evaluated. It was observed that the surface roughness and grain size decreased with increasing C content. A nanolaminated structure was obtained when the C2H2 gas flow rate was 17.5 sccm. The CrCN coating containing 3.5 at.% C showed the optimal hardness, adhesion and tribological properties in this work. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：482 / 486

页数：5

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