Neutral wetting brush layers for block copolymer thin films using homopolymer blends processed at high temperatures

被引:16
作者
Ceresoli, M. [1 ,2 ]
Palermo, M. [1 ]
Ferrarese Lupi, F. [1 ]
Seguini, G. [1 ]
Perego, M. [1 ]
Zuccheri, G. [3 ,4 ,5 ]
Phadatare, S. D. [3 ,4 ,5 ]
Antonioli, D. [6 ]
Gianotti, V. [6 ]
Sparnacci, K. [6 ]
Laus, M. [6 ]
机构
[1] IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy
[2] Univ Milan, Dipartimento Fis, I-20133 Milan, Italy
[3] Univ Bologna, Dept Pharm & Biotechnol, I-40126 Bologna, Italy
[4] Univ Bologna, Interdept Ctr Ind Res Hlth Sci & Technol, I-40126 Bologna, Italy
[5] Natl Interuniv Consortium Mat Sci & Technol INSTM, Ctr S3, Ist Nanosci CNR NANO, Italian Natl Res Council, Milan, Italy
[6] Univ Piemonte Orientale, Dipartimento Sci & Innovaz Tecnol DISIT, INSTM UdR Alessandria, I-15121 Alessandria, Italy
关键词
rapid thermal processing (RTP); surface neutralization; PMMA; PS; PS-b-PMMA; CONTROLLED INTERFACIAL INTERACTIONS; PS-B-PMMA; POLY(METHYL METHACRYLATE); MICRODOMAIN ORIENTATION; SURFACE NEUTRALIZATION; THERMAL-DEGRADATION; POLYMER BRUSHES; POLYSTYRENE; LITHOGRAPHY; FUNCTIONALIZATION;
D O I
10.1088/0957-4484/26/41/415603
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Binary homopolymer blends of two hydroxyl-terminated polystyrene (PS-OH) and polymethylmethacrylate (PMMA-OH) homopolymers (Mn similar to 16000 g mol(-1)) were grafted on SiO2 substrates by high-temperature (T > 150 degrees C), short-time (t < 600 s) thermal treatments. The resulting brush layer was tested to screen preferential interactions of the SiO2 substrate with the different symmetric and asymmetric PS-b-PMMA block copolymers deposited on top of the grafted molecules. By properly adjusting the blend composition and the processing parameters, an efficient surface neutralization path was identified, enabling the formation, in the block copolymer film, of homogeneous textures of lamellae or cylinders perpendicularly oriented with respect to the substrate. A critical interplay between the phase segregation of the homopolymer blends and their grafting process on the SiO2 was observed. In fact, the polar SiO2 is preferential for the PMMA-rich phase that forms a homogeneous layer on the substrate, while the PS-rich phase is located at the polymer-air interface. During the thermal treatment, phase segregation and grafting proceed simultaneously. Complete wetting of the PS rich phase on the PMMA rich phase leads to the formation of a PS/PMMA bilayer. In this case, the progressive diffusion of PS chains toward the polymer-SiO2 interface during the thermal treatment allows tuning of the brush layer composition.
引用
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页数:12
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共 52 条
[1]   Facile routes to patterned surface neutralization layers for block copolymer lithography [J].
Bang, Joona ;
Bae, Joonwon ;
Lowenhielm, Peter ;
Spiessberger, Christian ;
Given-Beck, Susan A. ;
Russell, Thomas P. ;
Hawker, Craig J. .
ADVANCED MATERIALS, 2007, 19 (24) :4552-+
[2]   Block Copolymer Nanolithography: Translation of Molecular Level Control to Nanoscale Patterns [J].
Bang, Joona ;
Jeong, Unyong ;
Ryu, Du Yeol ;
Russell, Thomas P. ;
Hawker, Craig J. .
ADVANCED MATERIALS, 2009, 21 (47) :4769-4792
[3]   Block Copolymer Lithography [J].
Bates, Christopher M. ;
Maher, Michael J. ;
Janes, Dustin W. ;
Ellison, Christopher J. ;
Willson, C. Grant .
MACROMOLECULES, 2014, 47 (01) :2-12
[4]   Polymeric Cross-Linked Surface Treatments for Controlling Block Copolymer Orientation in Thin Films [J].
Bates, Christopher M. ;
Strahan, Jeffrey R. ;
Santos, Logan J. ;
Mueller, Brennen K. ;
Bamgbade, Benjamin O. ;
Lee, Jonathan A. ;
Katzenstein, Joshua M. ;
Ellison, Christopher J. ;
Willson, C. Grant .
LANGMUIR, 2011, 27 (05) :2000-2006
[5]   Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates [J].
Bita, Ion ;
Yang, Joel K. W. ;
Jung, Yeon Sik ;
Ross, Caroline A. ;
Thomas, Edwin L. ;
Berggren, Karl K. .
SCIENCE, 2008, 321 (5891) :939-943
[6]   Entanglements at polymer surfaces and interfaces [J].
Brown, HR ;
Russell, TP .
MACROMOLECULES, 1996, 29 (02) :798-800
[7]   Evolution of lateral ordering in symmetric block copolymer thin films upon rapid thermal processing [J].
Ceresoli, Monica ;
Ferrarese Lupi, Federico ;
Seguini, Gabriele ;
Sparnacci, Katia ;
Gianotti, Valentina ;
Antonioli, Diego ;
Laus, Michele ;
Boarino, Luca ;
Perego, Michele .
NANOTECHNOLOGY, 2014, 25 (27)
[8]   Nanostructure engineering by templated self-assembly of block copolymers [J].
Cheng, JY ;
Mayes, AM ;
Ross, CA .
NATURE MATERIALS, 2004, 3 (11) :823-828
[9]   Pattern Formation in Polymer Blend Thin Films: Surface Roughening Couples to Phase Separation [J].
Coveney, Sam ;
Clarke, Nigel .
PHYSICAL REVIEW LETTERS, 2014, 113 (21)
[10]   Directing the self-assembly of block copolymers [J].
Darling, S. B. .
PROGRESS IN POLYMER SCIENCE, 2007, 32 (10) :1152-1204