Design and Custom Fabrication of a Smart Temperature Sensor for an Organ-on-a-chip Platform

被引：0
|
作者：
Ponte, Ronaldo [1 ]
Giagka, Vasiliki [1 ,2 ]
Serdijn, Wouter A. [1 ]
机构：
[1] Delft Univ Technol, Fac EEMCS, Dept Microelect, Sect Bioelect, Delft, Netherlands
[2] Fraunhofer Inst Reliabil & Microintegrat IZM, Technol Bioelect Grp, Berlin, Germany
来源：
2018 IEEE BIOMEDICAL CIRCUITS AND SYSTEMS CONFERENCE (BIOCAS): ADVANCED SYSTEMS FOR ENHANCING HUMAN HEALTH | 2018年
关键词：
Smart temperature sensor; organ-on-a-chip; time-mode signal-processing; IC MEMS co-design;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The proposed circuit is developed to provide the first out-of-incubator temperature monitoring of cell cultures on an OOC platform in a monolithic fabrication. Measurement results on wafer reveal a temperature measurement resolution of less than +/- 0.2 degrees C (3 sigma) and a maximum nonlinearity error of less than 0.3% across a temperature range from 25 degrees C to 100 degrees C.
引用
收藏
页码：667 / 670
页数：4
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