Advanced PIC-MCC simulation for the investigation of step-ionization effect in intermediate-pressure capacitively coupled plasmas

被引：20

作者：

Kim, Jin Seok ^{[1
]}

Hur, Min Young ^{[1
]}

Kim, Chang Ho ^{[1
]}

Kim, Ho Jun ^{[2
]}

Lee, Hae June ^{[1
]}

机构：

[1] Pusan Natl Univ, Dept Elect Engn, Busan 609735, South Korea

[2] Samsung Elect, Memory Thin Film Technol Team, Hwaseong 445701, South Korea

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2018年 / 51卷 / 10期

关键词：

particle-in-cell simulation; capacitively coupled plasmas; step ionization; CELL/MONTE CARLO METHOD; IN-CELL SIMULATION; DC MAGNETRON DISCHARGE; MONTE-CARLO; PARTICLE SIMULATION; RF DISCHARGES; FREQUENCY; MODEL; ENERGY; ARGON;

D O I：

10.1088/1361-6463/aaa941

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A two-dimensional parallelized particle-in-cell simulation has been developed to simulate a capacitively coupled plasma reactor. The parallelization using graphics processing units is applied to resolve the heavy computational load. It is found that the step-ionization plays an important role in the intermediate gas pressure of a few Torr. Without the step-ionization, the average electron density decreases while the effective electron temperature increases with the increase of gas pressure at a fixed power. With the step-ionization, however, the average electron density increases while the effective electron temperature decreases with the increase of gas pressure. The cases with the step-ionization agree well with the tendency of experimental measurement. The electron energy distribution functions show that the population of electrons having intermediate energy from 4.2 to 12 eV is relaxed by the stepionization. Also, it was observed that the power consumption by the electrons is increasing with the increase of gas pressure by the step-ionization process, while the power consumption by the ions decreases with the increase of gas pressure.

引用

页数：9