Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage

被引：5
|
作者：
Holub, Ondrej [1 ]
Cimprich, Thomas [2 ]
Ferreira, Antoine [3 ]
Hurak, Zdenek [4 ]
Breguet, Jean-Marc [5 ]
机构：
[1] FEE CTU, Dept Control Engn, Prague, Czech Republic
[2] Ecole Polytech Fed Lausanne, Lab Syst Robot, Lausanne, Switzerland
[3] ENSI, Lab Vis Robot, Bourges, France
[4] FEE CTU, Ctr Appl Cybernet, Prague, Czech Republic
[5] Ecole Polytech Fed Lausanne, Lab Syst Robot, Lausanne, Switzerland
来源：
2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS | 2006年
关键词：
ultrasonic; piezoelectric actuator; position control;
D O I：
10.1109/ULTSYM.2006.575
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor high speed and high accuracy at the same time. Tracking of I mm steps with 30 nm error in down to 100 ms has been achieved.
引用
收藏
页码：2277 / +
页数：2
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