Materials Science and Microelectronics

被引：0

作者：

Mahajan, S. ^{[1
]}

机构：

[1] Arizona State Univ, Dept Chem Engn & Mat Sci, Tempe, AZ 85287 USA

来源：

ELECTRONIC MATERIALS LETTERS | 2006年 / 2卷 / 02期

关键词：

electromigration; Schotty and Ohmic contacts; dislocations in III-V crystals; microstructures of mixed III-V layers; integration of dissimilar materials; low-dimensional structures;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We demonstrate using examples that materials science played a crucial role in the evolution of microelectronics in the past, its significant current role and its envisaged role in the future as device dimensions decrease substantially. The technical challenges are significant because we do not fully understand the behavior of materials at extremely small length scales.

引用

页码：59 / 72

页数：14

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