Dimensional considerations in achieving large quality factors for resonant silicon cantilevers in air

This work aims to provide guidelines for designing rectangular silicon cantilever beams to achieve maximum quality factors for the fundamental flexural resonance at atmospheric pressure. The methodology of this work is based on experimental data acquisition of resonance characteristics of silicon cantilevers, combined with modification of analytical damping models to match the captured data. For this purpose, rectangular silicon cantilever beams with thicknesses of 5, 7, 8, 11, and 17 mu m and lengths and widths ranging from 70 to 1050 mu m and 80 to 230 mu m, respectively, have been fabricated and tested. Combining the three dominant damping mechanisms, i.e., the air damping, support loss, and thermoelastic damping, the variation in the measured Q-factors with the cantilever geometrical dimensions is predicted. Also to better describe the experimental data, modified models for air damping have been developed. These modified models can predict the optimum length and thickness of a resonant cantilever to achieve the maximum quality factor at the fundamental flexural resonance mode in air. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3062204]