The development of vacuum measurements down to extremely high vacuum - XHV

被引：14

作者：

Calcatelli, Anita ^{[1
]}

机构：

[1] INRiM, I-10135 Turin, Italy

来源：

MEASUREMENT | 2013年 / 46卷 / 02期

关键词：

Vacuum; Gauge; Ionization; Desorption; ESD; Photocurrent; SYMMETRIC TRANSMISSION GAUGE; TOTAL PRESSURE MEASUREMENT; CATHODE-IONIZATION GAUGE; PRIMARY STANDARD; MAGNETRON GAUGE; MAJOR ADVANCES; ION DEFLECTOR; ULTRAHIGH; CALIBRATION; MANOMETER;

D O I：

10.1016/j.measurement.2012.08.018

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The available measuring devices in the ultra-high and extreme high vacuum range with their limitations are presented on the basis of the ultimate attainable pressure. New miniature gauges and calibration devices up now available are shortly reviewed. A complete bibliography is presented. (C) 2012 Elsevier Ltd. All rights reserved.

引用

页码：1029 / 1039

页数：11

共 104 条

[1]

Adam H., 1880, HIST VACUUM SCI TECH, V2, P83

[2]

Adam H., 1871, VACUUM SCI TECHNOL P, V2, P75

[3] Generation and pressure measurement of extremely high vacuum (XHV) using a TiN coated chamber [J].