Driving frequency effects on the characteristics of atmospheric pressure capacitive helium discharge

被引：29

作者：

Moon, Se Youn ^{[1
]}

Kim, D. B. ^{[1
]}

Gweon, B. ^{[1
]}

Choe, W. ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 22期

关键词：

electron density; glow discharges; helium; high-frequency discharges; plasma density; plasma diagnostics; plasma sheaths;

D O I：

10.1063/1.3043451

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Atmospheric pressure helium discharge characteristics were investigated for varying driving radio frequencies in the range between 1.86 and 27.1 MHz. As the driving frequency is raised, both gas breakdown and alpha-gamma transition voltages decrease due to the reduction in the electron drift loss. In addition, different discharge features such as normal, abnormal, alpha, and gamma modes show certain dependences on the frequency. Using a simple circuit model, the changes in sheath thickness from 2.35 to 0.11 mm, electron density from 0.26 to 15.6x10(11) cm(-3) was obtained by raising the frequency from 1.86 to 27.1 MHz.

引用

页数：3

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