Effects of a new stacking method on characteristics of multilayered BaTiO3 thin film

被引:29
作者
Song, MH [1 ]
Lee, YH [1 ]
Hahn, TS [1 ]
Oh, MH [1 ]
Yoon, KH [1 ]
机构
[1] YONSEI UNIV,DEPT CERAM ENGN,SEOUL,SOUTH KOREA
关键词
D O I
10.1063/1.361208
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new deposition method used to prepare BaTiO3 thin films resulted in multilayered structure with higher dielectric constant, capacitance per unit area, and breakdown strength than those prepared by a conventional stacking method; the new method continuously decreased the substrate temperature after initial deposition of a polycrystalline BaTiO3 layer. The observed high dielectric constant could be explained only by a multilayered amorphous/microcrystalline/polycrystalline structure, the nature of which was confirmed by scanning electron microscopy and index of refraction measurement. Well-defined ferroelectric hysteresis loops were observed as well with insignificant leakage current effects. (C) 1996 American Institute of Physics.
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页码:3744 / 3748
页数:5
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