Nonlinear dynamics in aluminum nitride contour-mode resonators

被引：7

作者：

Miller, Nicholas ^{[1
]}

Piazza, Gianluca ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

来源：

APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 01期

关键词：

Nitrides - Anelastic relaxation - Dynamics - Aluminum nitride - Frequency response;

D O I：

10.1063/1.4861461

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this work, we discuss the self-heating nonlinear dynamics of aluminum nitride contour mode resonators. The self-heating introduces a quadratic coupling between the resonator motion and its temperature. This coupling produces a nonlinear frequency response identical to the weakly nonlinear Duffing resonator in steady-state. However, since the thermal relaxation rate is much smaller than the mechanical relaxation rate, the dynamics of the resonator differ from the conventional Duffing resonator. (C) 2014 AIP Publishing LLC.

引用

页数：4