Suspended Nanoscale Field Emitter Devices for High-Temperature Operation

被引：16

作者：

De Rose, Lucia B. ^{[1
]}

Scherer, Axel ^{[1
]}

Jones, William M. ^{[2
]}

机构：

[1] CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA

[2] CALTECH, Jet Prop Lab, Pasadena, CA 91125 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2020年 / 67卷 / 11期

关键词：

Electron emission; Fowler-Nordheim field emission; Frenkel-Poole emission; high-temperature; leakage current; metallic emitter; vacuum microelectronics; ELECTRON-EMISSION; ARRAYS;

D O I：

10.1109/TED.2020.3019765

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we demonstrate suspended two- and four-terminal field emission devices for high-temperature operation. The planar structures were fabricated with tungsten on a 200-nm silicon nitride membrane. The insulator in the vicinity of the terminals was removed to minimize undesirable Frenkel-Poole emission and increase the resistance of leakage current pathways. The effects of temperatures up to 450 degrees C on Fowler-Nordheim emission characteristics and parasitic leakage resistance were studied. Turn-on voltages with magnitudes under 15 V that further decreased as a function of increasing temperature for the two-terminal device were reported. Gating at temperatures of 150 degrees C and 300 degrees C was shown for the fourterminal device, and corresponding transconductance and cutoff frequency values were computed.

引用

页码：5125 / 5131

页数：7

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