Suspended Nanoscale Field Emitter Devices for High-Temperature Operation

被引：15

作者：

De Rose, Lucia B. ^{[1
]}

Scherer, Axel ^{[1
]}

Jones, William M. ^{[2
]}

机构：

[1] CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA

[2] CALTECH, Jet Prop Lab, Pasadena, CA 91125 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2020年 / 67卷 / 11期

关键词：

Electron emission; Fowler-Nordheim field emission; Frenkel-Poole emission; high-temperature; leakage current; metallic emitter; vacuum microelectronics; ELECTRON-EMISSION; ARRAYS;

D O I：

10.1109/TED.2020.3019765

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we demonstrate suspended two- and four-terminal field emission devices for high-temperature operation. The planar structures were fabricated with tungsten on a 200-nm silicon nitride membrane. The insulator in the vicinity of the terminals was removed to minimize undesirable Frenkel-Poole emission and increase the resistance of leakage current pathways. The effects of temperatures up to 450 degrees C on Fowler-Nordheim emission characteristics and parasitic leakage resistance were studied. Turn-on voltages with magnitudes under 15 V that further decreased as a function of increasing temperature for the two-terminal device were reported. Gating at temperatures of 150 degrees C and 300 degrees C was shown for the fourterminal device, and corresponding transconductance and cutoff frequency values were computed.

引用

页码：5125 / 5131

页数：7

共 50 条

[1] Nanoscale silver sintering for high-temperature packaging of semiconductor devices
Zhang, ZY
Calata, JN
Bai, JG
Lu, GQ
SURFACES AND INTERFACES IN NANOSTRUCTURED MATERIALS AND TRENDS IN LIGA, MINIATURIZATION, AND NANOSCALE MATERIALS, 2004, : 129 - 135
[2] Nanoscale high-temperature superconductivity
Mohanty, P
Wei, JYT
Ananth, V
Morales, P
Skocpol, W
PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2004, 408 : 666 - 669
[3] A HIGH-TEMPERATURE POLYMERIC ION EMITTER
SHUVAEV, VP
SAZHIN, BI
DREIMAN, NA
SOVIET ELECTROCHEMISTRY, 1981, 17 (11): : 1468 - 1469
[4] HIGH-TEMPERATURE OPERATION
不详
AIRCRAFT ENGINEERING, 1974, 46 (07): : 8 - &
[5] SEMICONDUCTING EMITTER WITH HIGH-TEMPERATURE STABILITY
MAKHNII, VP
PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1991, 17 (03): : 17 - 21
[6] Field models of high-temperature superconductor devices for magnetic levitation
Costamagna, E.
Di Barba, P.
Palka, R.
ENGINEERING COMPUTATIONS, 2012, 29 (5-6) : 605 - 616
[7] Fluidic packaging of microengine and microrocket devices for high-pressure and high-temperature operation
Peles, Y
Srikar, VT
Harrison, TS
Protz, C
Mracek, A
Spearing, SM
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (01) : 31 - 40
[8] Nanoscale optical high-temperature sensor
Zograf, George P.
Petrov, Mihail I.
Sinev, Ivan S.
Samusev, Anton K.
Zuev, Dmitry A.
Milichko, Valentin A.
Makarov, Sergey V.
2017 IEEE INTERNATIONAL CONFERENCE ON MICROWAVES, ANTENNAS, COMMUNICATIONS AND ELECTRONIC SYSTEMS (COMCAS), 2017, : 549 - 550
[9] Adventures in high-temperature resistive emitter physics
Solomon, S
Bryant, P
TECHNOLOGIES FOR SYNTHETIC ENVIRONMENTS: HARDWARE-IN-THE-LOOP TESTING VIII, 2003, 5092 : 52 - 60
[10] Monolithic terahertz emitter of high-temperature superconductors
Kakeya, Itsuhiro
Elarabi, Asem
Maeda, Keiichiro
Fujita, Shuma
Tsujimoto, Manabu
2019 44TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ), 2019,

← 1 2 3 4 5 →