Simultaneous electrical and optical readout of graphene-coated high Q silicon nitride resonators

被引:21
作者
Adiga, V. P. [1 ]
De Alba, R. [2 ]
Storch, I. R. [2 ]
Yu, P. A. [3 ]
Ilic, B. [4 ]
Barton, R. A. [1 ]
Lee, S. [5 ]
Hone, J. [5 ]
McEuen, P. L. [6 ,7 ]
Parpia, J. M. [2 ]
Craighead, H. G. [1 ]
机构
[1] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[2] Cornell Univ, Dept Phys, Ithaca, NY 14853 USA
[3] CALTECH, Dept Chem Engn, Pasadena, CA 91125 USA
[4] Cornell NanoScale Sci & Technol Facil, Ithaca, NY 14853 USA
[5] Columbia Univ, New York, NY 14853 USA
[6] Lab Atom & Solid State Phys, Ithaca, NY 14853 USA
[7] Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA
关键词
NANOELECTROMECHANICAL SYSTEMS; MONOLAYER GRAPHENE; MASS-SPECTROMETRY; CAVITY; FABRICATION;
D O I
10.1063/1.4823457
中图分类号
O59 [应用物理学];
学科分类号
摘要
Resonant mechanics of high quality factor (Q) graphene coated silicon nitride devices have been explored using optical and electrical transduction schemes. With the addition of the graphene layer, we retain the desirable mechanical properties of silicon nitride but utilize the electrical and optical properties of graphene to transduce and tune the resonant motion by both optical and electrical means. By positioning the graphene-on-silicon-nitride drums in a tunable optical cavity, we observe position dependent damping and resonant frequency control of the devices due to optical absorption by graphene. (C) 2013 AIP Publishing LLC.
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页数:4
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