Application and calibration of a quartz needle sensor for high resolution scanning force microscopy

被引:20
作者
Clauss, W [1 ]
Zhang, J
Bergeron, DJ
Johnson, AT
机构
[1] Univ Penn, Dept Phys & Astron, Philadelphia, PA 19104 USA
[2] Univ Tubingen, Inst Phys Appl, D-72076 Tubingen, Germany
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 04期
关键词
D O I
10.1116/1.590751
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have investigated a force sensing technique for high-resolution scanning force microscopy which uses a piezoelectric quarts resonator oscillating perpendicular to the direction of the sample surface at a frequency of 1 MHz. The achievement of true atomic resolution on single-wall carbon nanotube surfaces illustrates the promises of this new technique which is especially well suited for ultrahigh vacuum or low-temperature conditions. The force sensitivity and the mechanical amplitude of the sensor oscillation were characterized semiquantitatively. (C) 1999 American Vacuum Society. [S0734-211X(99)08504-2].
引用
收藏
页码:1309 / 1312
页数:4
相关论文
共 9 条
[1]   AN EASILY OPERABLE SCANNING TUNNELING MICROSCOPE [J].
BESOCKE, K .
SURFACE SCIENCE, 1987, 181 (1-2) :145-153
[2]   COMBINED SHEAR FORCE AND NEAR-FIELD SCANNING OPTICAL MICROSCOPY [J].
BETZIG, E ;
FINN, PL ;
WEINER, JS .
APPLIED PHYSICS LETTERS, 1992, 60 (20) :2484-2486
[3]  
CLAUSS W, UNPUB EUROPHYS LETT
[4]   Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor [J].
Edwards, H ;
Taylor, L ;
Duncan, W ;
Melmed, AJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) :980-984
[5]   APPLICATION OF THE NEEDLE SENSOR FOR MICROSTRUCTURE MEASUREMENTS AND ATOMIC-FORCE MICROSCOPY [J].
GRUNEWALD, U ;
BARTZKE, K ;
ANTRACK, T .
THIN SOLID FILMS, 1995, 264 (02) :169-171
[6]  
GUETHNER P, 1996, J VAC SCI TECHNOL B, V14, P2428
[7]   PIEZOELECTRIC TIP-SAMPLE DISTANCE CONTROL FOR NEAR-FIELD OPTICAL MICROSCOPES [J].
KARRAI, K ;
GROBER, RD .
APPLIED PHYSICS LETTERS, 1995, 66 (14) :1842-1844
[8]  
LUETHI E, 1996, Z PHYS B, V100, P165
[9]  
Ruoff R. S., 1996, CARBON NANOTUBES