Oxygen sensing properties of SrTiO3 thin films

被引：19
|
作者：
Hara, Toru [1 ]
Ishiguro, Takashi [1 ]
Wakiya, Naoki [2 ]
Shinozaki, Kazuo [3 ]
机构：
[1] Taiyo Yuden Co Ltd, Dev Planning Div, Gunma 3708522, Japan
[2] Shizuoka Univ, Fac Engn, Dept Mat Sci, Naka Ku, Hamamatsu, Shizuoka 4328561, Japan
[3] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Met & Ceram Sci, Meguro Ku, Tokyo 1528550, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2008年 / 47卷 / 09期
关键词：
gas sensor; oxygen sensor; resistive sensor; SrTiO3 thin film; polaron;
D O I：
10.1143/JJAP.47.7486
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The oxygen sensing properties of SrTiO3-based thin films have been investigated at room temperature. First, nondoped SrTiO3 was investigated. Although such a material is highly sensitive, its electrical resistance was too high and not feasible for practical use. Donor (Nb5+) could lower the resistance of SrTiO3; however, the sensitivity was lost. UV-light irradiation or t(2)-type acceptor (Cr3+) doping could lower the resistance and yet maintain file sensitivity. In contrast to t(2)-type acceptor doping, e-type acceptor (Fe3+) doping could lower the resistance; however, the sensitivity was lost. In this paper, we discuss the phenomena from the viewpoint of polaron-controlled carrier conduction.
引用
收藏
页码：7486 / 7489
页数：4
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