Polymeric cantilever integrated with PDMS/graphene composite strain sensor

被引:16
作者
Choi, Young-Soo [1 ]
Gwak, Min-Joo [1 ]
Lee, Dong-Weon [1 ]
机构
[1] Chonnam Natl Univ, Sch Mech Engn, MEMS & Nanotechnol Lab, Gwangju 500757, South Korea
基金
新加坡国家研究基金会;
关键词
PIEZORESISTIVE READ-OUT; ELECTRICAL DETECTION; BIOSENSORS; MICROCANTILEVER; FABRICATION; CHIP;
D O I
10.1063/1.4962925
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
This paper describes the mechanical and electrical characteristics of a polydimethylsiloxane ( PDMS) cantilever integrated with a high-sensitivity strain sensor. The strain sensor is fabricated using PDMS and graphene flakes that are uniformly distributed in the PDMS. In order to prepare PDMS/graphene composite with uniform resistance, a tetrahydrofuran solution is used to decrease the viscosity of a PDMS base polymer solution. A horn-type sonicator is then used to mix the base polymer with graphene flakes. Low viscosity of the base polymer solution improves the reliability and reproducibility of the PDMS/graphene composite for strain sensor applications. After dicing the composite into the desired sensor shape, a tensile test is performed. The experimental results show that the composite with a concentration of 30 wt.% exhibits a linear response up to a strain rate of 9%. The graphene concentration of the prepared materials affects the gauge factor, which at 20% graphene concentration reaches about 50, and with increasing graphene concentration to 30% decreases to 9. Furthermore, photolithography, PDMS casting, and a stencil process are used to fabricate a PDMS cantilever with an integrated strain sensor. The change in resistance of the integrated PDMS/graphene sensor is characterized with respect to the displacement of the cantilever of within 500 mu m. The experimental results confirmed that the prepared PDMS/graphene based sensor has the potential for high-sensitive biosensor applications. Published by AIP Publishing.
引用
收藏
页数:7
相关论文
共 38 条
[1]   Microfluidic heart on a chip for higher throughput pharmacological studies [J].
Agarwal, Ashutosh ;
Goss, Josue Adrian ;
Cho, Alexander ;
McCain, Megan Laura ;
Parker, Kevin Kit .
LAB ON A CHIP, 2013, 13 (18) :3599-3608
[2]   Biohybrid thin films for measuring contractility in engineered cardiovascular muscle [J].
Alford, Patrick W. ;
Feinberg, Adam W. ;
Sheehy, Sean P. ;
Parker, Kevin K. .
BIOMATERIALS, 2010, 31 (13) :3613-3621
[3]   Low-noise polymeric nanomechanical biosensors [J].
Calleja, M ;
Tamayo, J ;
Nordström, M ;
Boisen, A .
APPLIED PHYSICS LETTERS, 2006, 88 (11)
[4]   Nanomechanical biosensors: a new sensing tool [J].
Carrascosa, LG ;
Moreno, M ;
Alvarez, M ;
Lechuga, LM .
TRAC-TRENDS IN ANALYTICAL CHEMISTRY, 2006, 25 (03) :196-206
[5]  
Chen Y, 2010, PROC IEEE MICR ELECT, P859, DOI 10.1109/MEMSYS.2010.5442342
[6]   Effect of carbon nanotube type and functionalization on the electrical, thermal, mechanical and electromechanical properties of carbon nanotube/styrene-butadiene-styrene composites for large strain sensor applications [J].
Costa, P. ;
Silva, J. ;
Anson-Casaos, A. ;
Martinez, M. T. ;
Abad, M. J. ;
Viana, J. ;
Lanceros-Mendez, S. .
COMPOSITES PART B-ENGINEERING, 2014, 61 :136-146
[7]   Controlling the contractile strength of engineered cardiac muscle by hierarchal tissue architecture [J].
Feinberg, Adam W. ;
Alford, Patrick W. ;
Jin, Hongwei ;
Ripplinger, Crystal M. ;
Werdich, Andreas A. ;
Sheehy, Sean P. ;
Grosberg, Anna ;
Parker, Kevin Kit .
BIOMATERIALS, 2012, 33 (23) :5732-5741
[8]   Translating biomolecular recognition into nanomechanics [J].
Fritz, J ;
Baller, MK ;
Lang, HP ;
Rothuizen, H ;
Vettiger, P ;
Meyer, E ;
Güntherodt, HJ ;
Gerber, C ;
Gimzewski, JK .
SCIENCE, 2000, 288 (5464) :316-318
[9]   A PMMA-BASED micro pressure sensor chip using carbon nanotubes as sensing elements [J].
Fung, CKM ;
Zhang, MQH ;
Chan, RHM ;
Li, WJ .
MEMS 2005 MIAMI: TECHNICAL DIGEST, 2005, :251-254
[10]   Flow based immuno/bioassay and trends in micro-immuno/biosensors [J].
Hartwell, Supaporn Kradtap ;
Grudpan, Kate .
MICROCHIMICA ACTA, 2010, 169 (3-4) :201-220