High-efficiency focusing waveguide grating coupler with parallelogramic groove profiles

被引：15

作者：

Liao, TD ^{[1
]}

Sheard, S ^{[1
]}

Li, M ^{[1
]}

Zhu, JG ^{[1
]}

Prewett, P ^{[1
]}

机构：

[1] RUTHERFORD APPLETON LAB,CENT MICROSTRUCT FACIL,DIDCOT OX11 0QX,OXON,ENGLAND

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1997年 / 15卷 / 07期

基金：

英国工程与自然科学研究理事会;

关键词：

diffractive optics; focusing; grating coupler; integrated optics; waveguide lens;

D O I：

10.1109/50.596959

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A high-efficiency focusing waveguide grating coupler (FWGC) using parallelogramic groove profiles is proposed, designed and fabricated, A new waveguide grating structure has been employed which consists of bilayered grating with one grating etched into the guiding layer and the other into a high index cladding layer, Computer simulation shows that both high directionality and large radiation decay factor are obtainable with this structure, Fabrication of this FWGC by electron beam lithography is described, A coupling efficiency of 86% and focusing spot size full-width at half maximum (FWHM) of around 10 mu m have been achieved.

引用

页码：1142 / 1148

页数：7

共 15 条

[1]

AGRWAL N, 1990 OSA TECH DIG SE, V7

[2] INTERFERENCE PHENOMENA IN WAVE-GUIDES WITH 2 CORRUGATED BOUNDARIES [J].

AVRUTSKY, IA ;

SVAKHIN, AS ;

SYCHUGOV, VA .

JOURNAL OF MODERN OPTICS, 1989, 36 (10) :1303-1320

[3] HIGH-EFFICIENCY SINGLE-ORDER WAVE-GUIDE GRATING COUPLER [J].

AVRUTSKY, IA ;

SVAKHIN, AS ;

SYCHUGOV, VA ;

PARRIAUX, O .

OPTICS LETTERS, 1990, 15 (24) :1446-1448

[4] DIRECTIONAL REACTIVE ION ETCHING AT OBLIQUE ANGLES [J].

BOYD, GD ;

COLDREN, LA ;

STORZ, FG .

APPLIED PHYSICS LETTERS, 1980, 36 (07) :583-585

[5] MULTILAYER MODAL METHOD FOR DIFFRACTION GRATINGS OF ARBITRARY PROFILE, DEPTH, AND PERMITTIVITY [J].

LI, LF .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (12) :2581-2591

[6] WAVE-GUIDE COUPLERS USING PARALLELOGRAMIC-SHAPED BLAZED GRATINGS [J].

LI, M ;

SHEARD, SJ .

OPTICS COMMUNICATIONS, 1994, 109 (3-4) :239-245

[7]

LI M, 1995, ELECTRON LETT, V30, P2126

[8] ANALYSIS OF THE BLAZING EFFECT IN 2ND-ORDER GRATINGS [J].

MATSUMOTO, M .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1992, 28 (10) :2016-2023

[9] DESIGN AND FABRICATION OF A SINGLE LEAKAGE-CHANNEL GRATING COUPLER [J].

RONCONE, RL ;

LI, LF ;

BATES, KA ;

BURKE, JJ ;

WEISENBACH, L ;

ZELINSKI, BJJ .

APPLIED OPTICS, 1993, 32 (24) :4522-4528

[10] INTEGRATED-OPTIC IMPLEMENTATION OF A CONFOCAL SCANNING OPTICAL MICROSCOPE [J].

SHEARD, S ;

SUHARA, T ;

NISHIHARA, H .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1993, 11 (08) :1400-1403

← 1 2 →