Preparation of PbZrxTi1-xO3 nanostructures on various substrates by MOCVD

被引：5

作者：

Shimizu, Masaru ^{[1
]}

Nonomura, Hajime ^{[1
]}

Fujisawa, Hironori ^{[1
]}

Niu, Hirohiko ^{[1
]}

Honda, Koichiro ^{[2
]}

机构：

[1] Univ Hyogo, Dept Elect Engn & Comp Sci, Grad Sch Engn, Himeji, Hyogo 6712201, Japan

[2] Fujitsu Lab Ltd, Atsugi, Kanagawa 2430197, Japan

来源：

JOURNAL OF CRYSTAL GROWTH | 2005年 / 275卷 / 1-2期

关键词：

Nanostructures; Metalorganic chemical vapor deposition; Oxides; Perovskites; Ferroelectric materials;

D O I：

10.1016/j.jcrysgro.2004.11.355

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

PbZrxT1-xO3 (PbTiO3 and PZT) nanostructures were prepared by self-assembly on Pt/SrTiO3 and SrRuO3/SrTiO3 substrates by metalorganic chemical vapor deposition (MOCVD). Structural control using epitaxial relations was demonstrated. Pyramidal-shaped, triangular-prism-shaped and square-shaped nanoislands were formed on Pt(1 1 1)/SrTiO3(1 1 1), Pt(1 1 0)/SrTiO3(1 1 0) and Pt(1 0 0)/SrTiO3(1 0 0), respectively. On Pt/SrTiO3, PbZrxTi1-xO3 showed the Volmer-Weber growth mode. Nanostructures prepared showed piezoresponse hysteresis loops, indicating that they are ferroelectric. The Stranski-Krastanov growth mode was observed for PbZrxTi1-xO3 on SrRuO3(1 0 0)/SrTiO3(1 0 0). (C) 2004 Elsevier B. V. All rights reserved.

引用

页码：E2433 / E2438

页数：6

共 15 条

[1] Patterning and switching of nanosize ferroelectric memory cells
Alexe, M
Harnagea, C
Hesse, D
Gösele, U
[J]. APPLIED PHYSICS LETTERS, 1999, 75 (12) : 1793 - 1795
[2] Self-patterning nano-electrodes on ferroelectric thin films for gigabit memory applications
Alexe, M
Scott, JF
Curran, C
Zakharov, ND
Hesse, D
Pignolet, A
[J]. APPLIED PHYSICS LETTERS, 1998, 73 (11) : 1592 - 1594
[3] Size effect in mesoscopic epitaxial ferroelectric structures:: Increase of piezoelectric response with decreasing feature size
Bühlmann, S
Dwir, B
Baborowski, J
Muralt, P
[J]. APPLIED PHYSICS LETTERS, 2002, 80 (17) : 3195 - 3197
[4] Ferroelectricity of the 1.7 nm-high and 38 nm-wide self-assembled PbTiO3 island
Fujisawa, H
Okaniwa, M
Nonomura, H
Shimizu, M
Niu, H
[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2004, 24 (06) : 1641 - 1645
[5] Observations of island structures at the initial growth stage of PbZrxTi1-xO3 thin films prepared by metalorganic chemical vapor deposition
Fujisawa, H
Morimoto, K
Shimizu, M
Niu, H
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (9B): : 5446 - 5450
[6] FUJISAWA H, 2001, MATER RES SOC S P, V655
[7] Scaling of ferroelectric and piezoelectric properties in Pt/SrBi2Ta2O9/Pt thin films
Ganpule, CS
Stanishevsky, A
Aggarwal, S
Melngailis, J
Williams, E
Ramesh, R
Joshi, V
de Araujo, CP
[J]. APPLIED PHYSICS LETTERS, 1999, 75 (24) : 3874 - 3876
[8] Mesoscopic ferroelectric cell arrays prepared by imprint lithography
Harnagea, C
Alexe, M
Schilling, J
Choi, J
Wehrspohn, RB
Hesse, D
Gösele, U
[J]. APPLIED PHYSICS LETTERS, 2003, 83 (09) : 1827 - 1829
[9] Dynamics of ferroelastic domains in ferroelectric thin films
Nagarajan, V
Roytburd, A
Stanishevsky, A
Prasertchoung, S
Zhao, T
Chen, L
Melngailis, J
Auciello, O
Ramesh, R
[J]. NATURE MATERIALS, 2003, 2 (01) : 43 - 47
[10] Self-assembled PbTiO3 nano-islands prepared on SrTiO3 by metalorganic chemical vapor deposition
Nonomura, H
Fujisawa, H
Shimizu, M
Niu, H
Honda, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (9B): : 5918 - 5921

← 1 2 →