A Sub-ppm Acetone Gas Sensor for Diabetes Detection Using 10 nm Thick Ultrathin InN FETs

被引：138

作者：

Kao, Kun-Wei ^{[1
]}

Hsu, Ming-Che ^{[2
]}

Chang, Yuh-Hwa ^{[1
]}

Gwo, Shangjr ^{[3
]}

Yeh, J. Andrew ^{[1
,2
]}

机构：

[1] Natl Tsing Hua Univ, Inst NanoEngn & MicroSyst, Hsinchu 30013, Taiwan

[2] Natl Tsing Hua Univ, Inst Elect Engn, Hsinchu 30013, Taiwan

[3] Natl Tsing Hua Univ, Dept Phys, Hsinchu 30013, Taiwan

来源：

SENSORS | 2012年 / 12卷 / 06期

关键词：

indium nitride (InN); acetone; gas sensor; diabetic; platinum (Pt); FIELD-EFFECT TRANSISTOR; ROOM-TEMPERATURE; SELECTIVE DETECTION; MEDICAL DIAGNOSIS; HYDROGEN; BREATH; NANOPARTICLES; NANORODS; GROWTH; FILMS;

D O I：

10.3390/s120607157

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An indium nitride (InN) gas sensor of 10 nm in thickness has achieved detection limit of 0.4 ppm acetone. The sensor has a size of 1 mm by 2.5 mm, while its sensing area is 0.25 mm by 2 mm. Detection of such a low acetone concentration in exhaled breath could enable early diagnosis of diabetes for portable physiological applications. The ultrathin InN epilayer extensively enhances sensing sensitivity due to its strong electron accumulation on roughly 5-10 nm deep layers from the surface. Platinum as catalyst can increase output current signals by 2.5-fold (94 vs. 37.5 mu A) as well as reduce response time by 8.4-fold (150 vs. 1,260 s) in comparison with bare InN. More, the effect of 3% oxygen consumption due to breath inhalation and exhalation on 2.4 ppm acetone gas detection was investigated, indicating that such an acetone concentration can be analyzed in air.

引用

页码：7157 / 7168

页数：12

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