Strain evolution of each type of grains in poly-crystalline (Ba,Sr)TiO3 thin films grown by sputtering

被引:6
作者
Park, Woo Young [2 ,3 ]
Park, Min Hyuk [2 ,3 ]
Lee, Jong Ho [2 ,3 ]
Yoon, Jung Ho [2 ,3 ]
Han, Jeong Hwan [2 ,3 ]
Choi, Jung-Hae [1 ]
Hwang, Cheol Seong [2 ,3 ]
机构
[1] Korea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
[2] Seoul Natl Univ, WCU Hybrid Mat Program, Dept Mat Sci & Engn, Seoul 151744, South Korea
[3] Seoul Natl Univ, Interuniv Semicond Res Ctr, Seoul 151744, South Korea
来源
SCIENTIFIC REPORTS | 2012年 / 2卷
基金
新加坡国家研究基金会;
关键词
STRONTIUM-TITANATE FILMS; POLARIZATION ENHANCEMENT; DIELECTRIC-PROPERTIES; ELECTRICAL-PROPERTIES; PHASE-DIAGRAMS; FERROELECTRICITY; STRESS; AXIS;
D O I
10.1038/srep00939
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The strain states of [111]-, [110]-, and [002]-oriented grains in poly-crystalline sputtered (Ba,Sr)TiO3 thin films on highly [111]-oriented Pt electrode/Si substrates were carefully examined by X-ray diffraction techniques. Remarkably, [002]-oriented grains respond more while [110]- and [111]-oriented grains do less than the theoretically estimated responses, which is understandable from the arrangement of the TiO6 octahedra with respect to the stress direction. Furthermore, such mechanical responses are completely independent of the degree of crystallization and film thickness. The transition growth temperature between the positive and negative strains was also different depending on the grain orientation. The unstrained lattice parameter for each type of grain was different suggesting that the oxygen vacancy concentration for each type of grain is different, too. The results reveal that polycrystalline (Ba,Sr)TiO3 thin films are not an aggregation of differently oriented grains which simply follow the mechanical behavior of single crystal with different orientations.
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页数:8
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