Reliability of AlGaN/GaN HEMTs: Permanent leakage current increase and output current drop

被引:35
作者
Marcon, D. [1 ]
Viaene, J. [1 ]
Favia, P. [1 ]
Bender, H. [1 ]
Kang, X. [1 ]
Lenci, S. [1 ]
Stoffels, S. [1 ]
Decoutere, S. [1 ]
机构
[1] IMEC, B-3001 Louvain, Belgium
关键词
TEMPERATURE; DEGRADATION; STRESS;
D O I
10.1016/j.microrel.2012.06.052
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work we report on the two most common failure modes for AlGaN/GaN-based HEMTs: the gate leakage increase and the output current drop. First, by performing step-stress experiments in function of the step-time (t(STEP)) we show that the critical voltage for the increase of gate leakage current depends on the t(STEP) and is not associated with a permanent drop of the output current. Consequently, identification of the critical voltage by means of step-stress is not meaningful per se since it depends on the t(STEP) used. Second, we show that during high power stress at high voltage a permanent output current drop occurs. The failure analysis reveals the formation of crystallographic defects in the AlGaN layer along the whole width of the gate, in agreement with the inverse piezoelectric theory. However, in contrast to the degradation model based on the inverse piezoelectric effect, these defects do not aid the leakage of electrons from the gate toward the drain electrode since the output current drop is not associated with an increase of the gate leakage current. Therefore, combining the outcome of the two experiments, we suggest that the two most common failure modes are not correlated despite both might concur to the device degradation. Finally, an excellent stability is shown for devices with reduced Al content in the AlGaN barrier, highlighting the fundamental role of strain on reliability of AlGaN/GaN-based devices. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:2188 / 2193
页数:6
相关论文
共 23 条
  • [1] Electric-Field-Driven Degradation in OFF-State Step-Stressed AlGaN/GaN High-Electron Mobility Transistors
    Chang, Chih-Yang
    Douglas, E. A.
    Kim, Jinhyung
    Lu, Liu
    Lo, Chien-Fong
    Chu, Byung-Hwan
    Cheney, D. J.
    Gila, B. P.
    Ren, F.
    Via, G. D.
    Cullen, David A.
    Zhou, Lin
    Smith, David J.
    Jang, Soohwan
    Pearton, S. J.
    [J]. IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2011, 11 (01) : 187 - 193
  • [2] Christiansen BD, 2011, 2011 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)
  • [3] Dammann M, 2011, INT INTEG REL WRKSP, P42, DOI 10.1109/IIRW.2011.6142585
  • [4] GaN HEMT reliability
    del Alamo, J. A.
    Joh, J.
    [J]. MICROELECTRONICS RELIABILITY, 2009, 49 (9-11) : 1200 - 1206
  • [5] Investigation of the effect of temperature during off-state degradation of AlGaN/GaN High Electron Mobility Transistors
    Douglas, E. A.
    Chang, C. Y.
    Gila, B. P.
    Holzworth, M. R.
    Jones, K. S.
    Liu, L.
    Kim, Jinhyung
    Jang, Soohwan
    Via, G. D.
    Ren, F.
    Pearton, S. J.
    [J]. MICROELECTRONICS RELIABILITY, 2012, 52 (01) : 23 - 28
  • [6] Role of oxygen in the OFF-state degradation of AlGaN/GaN high electron mobility transistors
    Gao, Feng
    Lu, Bin
    Li, Libing
    Kaun, Stephen
    Speck, James S.
    Thompson, Carl V.
    Palacios, Tomas
    [J]. APPLIED PHYSICS LETTERS, 2011, 99 (22)
  • [7] Hodge MD, 2012, 2012 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)
  • [8] Jimenez J, 2011, GAN SIC DEGRADATION
  • [9] X-band GaNFET rellability
    Jimenez, J. L.
    Chowdhury, U.
    [J]. 2008 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 46TH ANNUAL, 2008, : 429 - +
  • [10] Joh J, 2011, 2011 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)