Deformation of Si(100) in spherical contacts - Comparison of nano-fretting and nano-scratch tests with nano-indentation

被引:33
作者
Beake, B. D. [1 ]
Liskiewicz, T. W. [2 ]
Smith, J. F. [1 ]
机构
[1] Micro Mat Ltd, Wrexham LL13 7YL, Wales
[2] Univ Leeds, Sch Mech Engn, Inst Engn Thermofluids Surfaces & Interfaces, Leeds LS2 9JT, W Yorkshire, England
关键词
Nano-tribology; Indentation; Nano-fretting; Silicon; MEMS; PHASE-TRANSFORMATIONS; MICRO-INDENTATION; SILICON; NANOINDENTATION; COATINGS; MECHANISMS; BEHAVIOR; LOADS; MAPS;
D O I
10.1016/j.surfcoat.2011.10.035
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Nano-indentation, nano-scratch and nano-fretting tests were performed on highly polished Si(100) using a commercial ultra-low drift nano-mechanical test system (NanoTest, Micro Materials Ltd.) fitted with a 4.6 mu m sphero-conical diamond indenter. In addition to plastic deformation, the contact deformation of Silicon is strongly affected by phase transformation and micro-/nano-fracture at room temperature. The objective of this work was to investigate the influence of tangential loading by comparison of deformation in the idealised loading in the nano-indentation test with the more complex tribo-contact situations. A novel method is introduced allowing quantitative comparison of deformation during loading in the nano-indentation, nano-scratch and nano-fretting tests. The loading curves in all three tests were almost identical at very low load. Tangential loading in the nano-scratch and nano-fretting tests promotes yield resulting in greater penetration depths at higher load than in nano-indentation. Contact damage assessment by in situ measurements of probe displacement during nano-fretting was supported by post-test SEM imaging and wear scar measurement by confocal microscopy. The nano-fretting crack morphology was related to the normal load applied and resulting track length. A brittle/ductile response of the material was observed, characterised by brittle micro-chips around wear track and ductile wear debris observed in the centre of the contact. The critical loads in the nano-scratch test show a subtle dependence on scan speed and loading rate. Pronounced lateral cracking observed in high load nano-scratch and nano-indentation tests is absent in the nano-fretting tests, which is consistent with the fretting wear process minimising the accumulation of strain. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:1921 / 1926
页数:6
相关论文
共 27 条
[1]   Microtribology: new tools to fill measurement gap [J].
Beake, B. D. ;
Achanta, S. ;
Liskiewicz, T. W. .
TRIBOLOGY-MATERIALS SURFACES & INTERFACES, 2010, 4 (03) :152-161
[2]   Nanomechanical and nanotribological testing of ultra-thin carbon-based and MoST films for increased MEMS durability [J].
Beake, B. D. ;
Goodes, S. R. ;
Shi, B. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (06)
[3]   Fatigue and debris generation at indentation-induced cracks in silicon [J].
Bhowmick, Sanjit ;
Cha, Hyunmin ;
Jung, Yeon-Gil ;
Lawn, Brian R. .
ACTA MATERIALIA, 2009, 57 (02) :582-589
[4]  
BHUSHAN B, 1995, WEAR, V181, P743
[5]  
Bradby J.E., 2001, MATER RES SOC S P, V649, pQ810
[6]   Mechanical deformation in silicon by micro-indentation [J].
Bradby, JE ;
Williams, JS ;
Wong-Leung, J ;
Swain, MV ;
Munroe, P .
JOURNAL OF MATERIALS RESEARCH, 2001, 16 (05) :1500-1507
[7]   Deforamtion mechanisms at pop-out in monocrystalline silicon under nanoindentation [J].
Chang, L. ;
Zhang, L. C. .
ACTA MATERIALIA, 2009, 57 (07) :2148-2153
[8]   Mechanical behaviour characterisation of silicon and effect of loading rate on pop-in: A nanoindentation study under ultra-low loads [J].
Chang, Li ;
Zhang, Liangchi .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2009, 506 (1-2) :125-129
[9]   Strength and sharp contact fracture of silicon [J].
Cook, RF .
JOURNAL OF MATERIALS SCIENCE, 2006, 41 (03) :841-872
[10]  
Domnich V., 2002, Reviews on Advanced Materials Science, V3, P1