Effect of collision parameters in electronegative plasma sheath with two species of positive ions

被引:32
作者
Moulick, R. [1 ]
Mahanta, M. K. [2 ]
Goswami, K. S. [1 ]
机构
[1] Ctr Plasma Phys, Inst Plasma Res, Sonapur 782402, Guwahati, India
[2] Arya Vidyapeeth Coll, Dept Phys, Gauhati 781016, India
关键词
BOHM CRITERION; NEGATIVE-IONS; PROFILES;
D O I
10.1063/1.4820803
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The effect of ion neutral collision is shown for two species of positive ions in electronegative plasma. The ion neutral collision is modeled using power law of collision cross section. It is a usual case for processing plasma to have two species of positive ions and hence we attempt to study the dynamics of the two species of ions inside the collisional sheath of electronegative plasma. (C) 2013 AIP Publishing LLC.
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页数:4
相关论文
共 17 条
[1]   Charged species profiles in oxygen plasma [J].
Berezhnoj, SV ;
Shin, CB ;
Buddemeier, U ;
Kaganovich, I .
APPLIED PHYSICS LETTERS, 2000, 77 (06) :800-802
[2]   INFLUENCE OF NEGATIVE-IONS ON THE PLASMA BOUNDARY SHEATH [J].
DEUTSCH, R ;
RAUCHLE, E .
PHYSICAL REVIEW A, 1992, 46 (06) :3442-3453
[3]   THEORY OF POSITIVE COLUMN INCLUDING SPACE-CHARGE EFFECTS [J].
FORREST, JR ;
FRANKLIN, RN .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1968, 1 (10) :1357-&
[4]   There is no such thing as a collisionally modified Bohm criterion [J].
Franklin, RN .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2003, 36 (22) :2821-2824
[5]  
Lieberman MA, 2005, PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING, 2ND EDITION, P1
[6]   Theory of sheath in a collisional multi-component plasma [J].
Mahanta, MK ;
Goswami, KS .
PRAMANA-JOURNAL OF PHYSICS, 2001, 56 (04) :579-584
[7]   CONSISTENT ANALYSIS OF A WEAKLY IONIZED PLASMA AND ITS BOUNDARY-LAYER [J].
RIEMANN, KU .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (10) :1432-1442
[8]   THE BOHM CRITERION AND SHEATH FORMATION [J].
RIEMANN, KU .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (04) :493-518
[9]   The positive ion temperature effect in magnetized electronegative plasma sheath with two species of positive ions [J].
Shaw, A. K. ;
Kar, S. ;
Goswami, K. S. .
PHYSICS OF PLASMAS, 2012, 19 (10)
[10]   COLLISIONAL PLASMA SHEATH MODEL [J].
SHERIDAN, TE ;
GOREE, J .
PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1991, 3 (10) :2796-2804