Initiation of tantalum oxide pores grown on tantalum by potentiodynamic anodic oxidation

被引：35

作者：

Sieber, I ^{[1
]}

Hildebrand, H ^{[1
]}

Friedrich, A ^{[1
]}

Schmuki, P ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Dept Mat Sci, Chair Surface Sci & Corros, D-91058 Erlangen, Germany

来源：

JOURNAL OF ELECTROCERAMICS | 2006年 / 16卷 / 01期

关键词：

porous tantalum oxide; self-organization; electrochemical oxidation; potentiodynamic anodic oxidation;

D O I：

10.1007/s10832-006-4351-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The initiation and growth of porous oxide on Ta was investigated in mixed H2SO4/HF electrolytes. Under selected potentiodynamic anodic oxidation conditions the formation of nearly uniform porous Ta2O5 layer was observed. The porous Ta2O5 layers consist of self-organized pore arrays with single pore diameters ranging from 2 to 10 nm. The morphology and the thickness of the layer depend strongly on the applied potential, the scan rate and on HF presence. The composition of the porous oxide layer is Ta2O5.

引用

页码：35 / 39

页数：5

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