Simulation of tunneling gate current in ultra-thin SOI MOSFETs

被引：0
|
作者：
Fiegna, C [1 ]
Abramo, A [1 ]
机构：
[1] Univ Ferrara, Dept Engn, I-44100 Ferrara, Italy
来源：
2001 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, PROCEEDINGS | 2001年
关键词：
D O I：
10.1109/ISDRS.2001.984451
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Numerical simulation is applied to analyze the tunneling gate current of ultra-thin single-gate SOI MOSFETs. The results of the self-consistent solution of 1-D Schrodinger and Poisson equations show that, for very thin silicon layers, the gate tunneling currents depend on the thickness of the silicon region because this significantly affects the 2-D subband structure in the inversion layer.
引用
收藏
页码：110 / 113
页数：4
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