Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

被引：3

作者：

Chang, TI

Huang, JL

Lin, HP

Wang, SC

Wu, L

Lin, CF

机构：

[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan

[2] Natl Cheng Kung Univ, Dept Chem, Tainan 701, Taiwan

[3] So Taiwan Univ Technol, Dept Mech Engn, Yung Kang 710, Tainan, Taiwan

[4] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 701, Taiwan

来源：

INTEGRATED FERROELECTRICS | 2005年 / 75卷

关键词：

PZT; sol-gel; piezoelectric ceramics; MPB;

D O I：

10.1080/10584580500413277

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multi-layers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1 degrees C/min) to the first preheating step (150 degrees C) and to second pyrolysis step (350 degrees C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700 degrees C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

引用

页码：55 / 68

页数：14

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