Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals

被引：23
|
作者：
Sones, C [1 ]
Mailis, S [1 ]
Apostolopoulos, V [1 ]
Barry, IE [1 ]
Gawith, C [1 ]
Smith, PGR [1 ]
Eason, RW [1 ]
机构：
[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 01期
关键词：
D O I：
10.1088/0960-1317/12/1/308
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photo lithographic patterning. electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50 mum x 50 mum x 5 mm in the x. z and v crystallographic directions, respectively, have been fabricated.
引用
收藏
页码：53 / 57
页数：5
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