Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals

被引：23

作者：

Sones, C ^{[1
]}

Mailis, S ^{[1
]}

Apostolopoulos, V ^{[1
]}

Barry, IE ^{[1
]}

Gawith, C ^{[1
]}

Smith, PGR ^{[1
]}

Eason, RW ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2002年 / 12卷 / 01期

关键词：

D O I：

10.1088/0960-1317/12/1/308

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photo lithographic patterning. electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50 mum x 50 mum x 5 mm in the x. z and v crystallographic directions, respectively, have been fabricated.

引用

页码：53 / 57

页数：5

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