Magnetic and self-biased properties of highly oriented M-type barium ferrite films on Pt-coated Si substrate by magnetron sputtering

被引:15
作者
Li, Yuanxun [1 ]
Liu, Yingli [1 ]
Li, Jie [1 ]
Yang, Kai [1 ]
Zhang, Huaiwu [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Films & Integrated Devices, Chengdu 610054, Peoples R China
关键词
HEXAFERRITE FILMS; THIN-FILMS; ORIENTATION; DEPOSITION; LINEWIDTHS; MEDIA;
D O I
10.1063/1.4798608
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly oriented M-type barium ferrite (BaM) thin films were deposited by sputtering on Pt-coated Si Substrate with different substrate temperatures. X-ray diffraction and atomic force microscopy results show that BaM films have crystal texture of c-axis grains perpendicular to film plane with apparent hexagonal morphology. On the other hand, it is clearly observed that the remanent magnetization (Mr) in out-plane is higher than those in in-plane, and the Mr in out-plane increases with increasing the substrate temperature, reaching maximum when substrate temperature (Ts) is 600 degrees C. The hysteresis curves also indicate that the BaM thin film exhibits nice self-biased property with 4 pi Mr of 3803.04 Gs, squareness ratio (Mr/Ms) of 0.96, and coercivity of 1767.3 Oe. These results make sure that these BaM films have potential for use in self-biasing microwave/millimeter wave magnetic devices such as circulators and isolators. (C) 2013 American Institute of Physics.
引用
收藏
页数:3
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