Dielectric Charging in MEMS Capacitive Switches A Persisting Reliability Issue, Available Models and Assessment Methods

被引：0
|
作者：
Koutsoureli, M. [1 ]
Birbiliotis, D. [1 ]
Michalas, L. [1 ]
Papaioannou, G. [1 ]
机构：
[1] Univ Athens, Dept Phys, Solid State Phys Sect, Athens 15784, Greece
来源：
2016 16TH MEDITERRANEAN MICROWAVE SYMPOSIUM (MMS) | 2016年
关键词：
MEMS; reliability; dielectric; charging; assessment; modeling; DEPOSITION CONDITIONS; FILMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The reliability issue of dielectric charging in MEMS capacitive switches is discussed taking into account the present knowledge derived from the numerous papers on this topic. The weakness of the available charge injection model is pointed, the dependence of the material stoichiometry with film thickness resulting in lateral charge redistribution is discussed, the available assessment techniques are presented and the discharge process through the dielectric film is analyzed.
引用
收藏
页数：4
相关论文
共 50 条
  • [21] Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film
    Birmpiliotis, D.
    Czarnecki, P.
    Koutsoureli, M.
    Papaioannou, G.
    De Wolf, I.
    MICROELECTRONIC ENGINEERING, 2016, 159 : 209 - 214
  • [22] Effect of Surface Conduction on Dielectric Charging in RF MEMS Capacitive Switches
    Peng, Zhen
    Molinero, David
    Palego, Cristiano
    Hwang, James C. M.
    Moody, Cody
    Malczewski, Andrew
    Pillans, Brandon W.
    2010 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (MTT), 2010, : 1250 - 1253
  • [23] Time and voltage dependence of dielectric charging in RF MEMS capacitive switches
    Herfst, R. W.
    Steeneken, P. G.
    Schmitz, J.
    2007 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 45TH ANNUAL, 2007, : 417 - +
  • [24] A MIM CAPACITOR STUDY OF DIELECTRIC CHARGING FOR RF MEMS CAPACITIVE SWITCHES
    Michalas, Loukas
    Koutsoureli, Matroni
    Papandreou, Eleni
    Gantis, Anestis
    Papaioannou, George
    FACTA UNIVERSITATIS-SERIES ELECTRONICS AND ENERGETICS, 2015, 28 (01) : 113 - 122
  • [25] Dielectric Charging in Capacitive RF MEMS Switches: The Effect of Electric Stress
    Tavassolian, Negar
    Koutsoureli, Matroni
    Papaioannou, George
    Lacroix, Benjamin
    Papapolymerou, John
    2010 ASIA-PACIFIC MICROWAVE CONFERENCE, 2010, : 1833 - 1836
  • [26] Contactless dielectric charging mechanisms in RF-MEMS capacitive switches
    Papaioannou, G. J.
    Wang, G.
    Bessas, D.
    Papapolymerou, J.
    2006 EUROPEAN MICROWAVE CONFERENCE, VOLS 1-4, 2006, : 263 - +
  • [27] Dielectric charging process in AlN RF-MEMS capacitive switches
    Papaioannou, George J.
    Lisec, Tomas
    2007 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE, VOLS 1 AND 2, 2007, : 241 - +
  • [28] Probing contactless injection dielectric charging in RF MEMS capacitive switches
    Michalas, L.
    Koutsoureli, M.
    Papaioannou, G.
    ELECTRONICS LETTERS, 2014, 50 (10) : 766 - U153
  • [29] Contactless dielectric charging mechanisms in RF-MEMS capacitive switches
    Papaioannou, G. J.
    Wang, G.
    Bessas, D.
    Papapolymerou, J.
    2006 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE, 2006, : 513 - +
  • [30] A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches
    van Spengen, WM
    Puers, R
    Mertens, R
    De Wolf, I
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (04) : 514 - 521
12345