Dielectric Charging in MEMS Capacitive Switches A Persisting Reliability Issue, Available Models and Assessment Methods

被引：0
|
作者：
Koutsoureli, M. [1 ]
Birbiliotis, D. [1 ]
Michalas, L. [1 ]
Papaioannou, G. [1 ]
机构：
[1] Univ Athens, Dept Phys, Solid State Phys Sect, Athens 15784, Greece
来源：
2016 16TH MEDITERRANEAN MICROWAVE SYMPOSIUM (MMS) | 2016年
关键词：
MEMS; reliability; dielectric; charging; assessment; modeling; DEPOSITION CONDITIONS; FILMS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The reliability issue of dielectric charging in MEMS capacitive switches is discussed taking into account the present knowledge derived from the numerous papers on this topic. The weakness of the available charge injection model is pointed, the dependence of the material stoichiometry with film thickness resulting in lateral charge redistribution is discussed, the available assessment techniques are presented and the discharge process through the dielectric film is analyzed.
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页数：4
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