An Efficient Earth Magnetic Field MEMS Sensor: Modeling, Experimental Results, and Optimization

被引：13

作者：

Bagherinia, Mehrdad ^{[1
]}

Bruggi, Matteo ^{[1
]}

Corigliano, Alberto ^{[1
]}

Mariani, Stefano ^{[1
]}

Horsley, David A. ^{[2
]}

Li, Mo ^{[3
]}

Lasalandra, Ernesto ^{[4
]}

机构：

[1] Politecn Milan, Dept Civil & Environm Engn, I-20133 Milan, Italy

[2] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA

[3] Univ Calif Davis, Dept Elect & Comp Engn, Davis, CA 95616 USA

[4] STMicroelectronics, Analog, MEMS, Sensors Grp, I-20010 Milan, Italy

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 04期

基金：

美国国家科学基金会;

关键词：

Magnetometer; Lorentz force; multi-physics modeling; experimental results; structural optimization; LORENTZ-FORCE;

D O I：

10.1109/JMEMS.2014.2357852

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new z-axis Lorentz force microelectromechanical systems magnetometer was designed, fabricated, and tested. The proposed device is characterized by simple design, reduced dimensions, and high efficiency. Furthermore, possible parasitic acceleration sensitivity is mechanically canceled in the proposed device. The initial design was subsequently studied through an ad hoc formulated multiphysics model used to compute the sensor dynamics; optimality of the design configuration was then obtained by means of a structural optimization approach. A wide scenario of design configurations, obtained with the proposed optimization approach, is finally discussed.

引用

页码：887 / 895

页数：9

共 16 条

[1] A Fully Integrated Inertial Measurement Unit: Application to Attitude and Heading Determination [J].

Alandry, Boris ;

Latorre, Laurent ;

Mailly, Frederick ;

Nouet, Pascal .

IEEE SENSORS JOURNAL, 2011, 11 (11) :2852-2860

[2] Geometry optimization of a Lorentz force, resonating MEMS magnetometer [J].

Bagherinia, M. ;

Bruggi, M. ;

Corigliano, A. ;

Mariani, S. ;

Lasalandra, E. .

MICROELECTRONICS RELIABILITY, 2014, 54 (6-7) :1192-1199

[3]

Bagherinia M, 2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), P700, DOI 10.1109/MEMSYS.2014.6765737

[4] Squeeze film air damping in MEMS [J].

Bao, Minhang ;

Yang, Heng .

SENSORS AND ACTUATORS A-PHYSICAL, 2007, 136 (01) :3-27

[5] Optimization of sensor placement to detect damage in flexible plates [J].

Bruggi, Matteo ;

Mariani, Stefano .

ENGINEERING OPTIMIZATION, 2013, 45 (06) :659-676

[6] Stationary response of Duffing oscillator with hardening stiffness and fractional derivative [J].

Chen, Lincong ;

Wang, Weihua ;

Li, Zhongshen ;

Zhu, Weiqiu .

INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2013, 48 :44-50

[7]

Corigliano A., 2013, PROC 14 INT C THERMA, P1

[8] Magnetic field measurements with a novel surface micromachined magnetic-field sensor [J].

Emmerich, H ;

Schöfthaler, M .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (05) :972-977

[9] A 3D micromechanical compass [J].

Kyynarainen, Jukka ;

Saarilahti, Jaakko ;

Kattelus, Hannu ;

Karkkainen, Anu ;

Meinander, Tor ;

Oja, Aarne ;

Pekko, Panu ;

Seppa, Heikki ;

Suhonen, Mika ;

Kuisma, Heikki ;

Ruotsalainen, Sami ;

Tilli, Markku .

SENSORS AND ACTUATORS A-PHYSICAL, 2008, 142 (02) :561-568

[10] Z-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process [J].

Langfelder, Giacomo ;

Buffa, Cesare ;

Frangi, Attilio ;

Tocchio, Alessandro ;

Lasalandra, Ernesto ;

Longoni, Antonio .

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2013, 60 (09) :3983-3990

← 1 2 →