FIB Fast Positioning Technology and its Application

被引：0

作者：

Lin Xiao-ling ^{[1
]}

Zhang Xiao-wen ^{[1
]}

机构：

[1] China Elect Prod Reliabil & Environm Testing Res, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Guangdong, Peoples R China

来源：

PROCEEDINGS OF THE 2013 20TH IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL & FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2013) | 2013年

关键词：

FIB; circuit edit; positioning technology;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Three kinds of FIB fast positioning technology were studied, including positioning according to the coordinate position, positioning with the help of navigation software, positioning according to optical image. They can be used for different use of purpose. Among them, positioning with the help of navigation software is suitable for invisible metal layer editing with minimum damage on die. At the same time, several cases are given to show how FIB fast positioning technology works.

引用

页码：537 / 541

页数：5

共 7 条

[1] Bassom N. J., 1999, ISTFA '99. Proceedings of the 25th International Symposium for Testing and Failure Analysis, P255
[2] Campbell Ann N., 1999, ISTFA P, P247
[3] Chao-Chi Wu, 2005, ISTFA 2005. Proceedings of the 31st International Symposium for Testing and Failure Analysis, P183
[4] HERSCHBEIN SB, MICROELECTRONIC FAIL, P517
[5] Hooghan K. N., 1999, ISTFA '99. Proceedings of the 25th International Symposium for Testing and Failure Analysis, P247
[6] Lee J. C., 2003, Conference Proceedings of the 29th International Symposium for Testing and Failure Analysis, P413
[7] Myers J., 2004, ISTFA 2004. Proceedings of the 30th International Symposium for Testing and Failure Analysis, P151

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