An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures

被引：83

作者：

Aluru, NR

White, J

机构：

[1] Dept. of Elec. Eng. and Comp. Sci., Massachusetts Inst. of Technology, Cambridge

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 58卷 / 01期

关键词：

electromechanical simulations; microelectromechanical systems; numerical techniques;

D O I：

10.1016/S0924-4247(97)80218-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The algorithm employs a hybrid finite-element/boundary-element technique for coupled mechanical and electrical analysis. The nonlinear coupled equations are solved by employing a Newton-GMRES technique. The coupled algorithm is shown to converge rapidly and is much faster than relaxation for tightly coupled cases.

引用

页码：1 / 11

页数：11

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