Single-pulse writing of a concave microlens array

被引：66

作者：

Cao, Xiao-Wen ^{[1
]}

Chen, Qi-Dai ^{[2
]}

Zhang, Lei ^{[1
]}

Tian, Zhen-Nan ^{[2
]}

Li, Qian-Kun ^{[2
]}

Wang, Lei ^{[2
]}

Juodkazis, Saulius ^{[4
,5
]}

Sun, Hong-Bo ^{[2
,3
]}

机构：

[1] Jilin Univ, State Key Lab Integrated Optoelect, Sch Mech Sci & Engn, Nanling Campus, Changchun 130025, Jilin, Peoples R China

[2] Jilin Univ, State Key Lab Integrated Optoelect, Coll Elect Sci & Engn, Changchun 130012, Jilin, Peoples R China

[3] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China

[4] Swinburne Univ Technol, Ctr Microphoton, Fac Sci Engn & Technol, Hawthorn, Vic 3122, Australia

[5] ANFF, Melbourne Ctr Nanofabricat, 151 Wellington Rd, Clayton, Vic 3168, Australia

来源：

OPTICS LETTERS | 2018年 / 43卷 / 04期

基金：

中国国家自然科学基金;

关键词：

LASER MICROFABRICATION; LENS ARRAY; FABRICATION;

D O I：

10.1364/OL.43.000831

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This work developed a method of femtosecond laser (fs-laser) parallel processing assisted by wet etching to fabricate 3D micro-optical components. A 2D fs-laser spot array with designed spatial distribution was generated by a spatial light modulator. A single-pulse exposure of the entire array was used for parallel processing. By subsequent wet etching, a close-packed hexagonal arrangement, 3D concave microlens array on a curved surface with a radius of approximately 120 mu m was fabricated, each unit lens of which has designable spatial distribution. Characterization of imaging was carried out by a microscope and showed a unique imaging property in multi-planes. This method provides a parallel and efficient technique to fabricate 3D micro-optical devices for applications in optofluidics, optical communication, and integrated optics. (C) 2018 Optical Society of America

引用

页码：831 / 834

页数：4

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